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Stable optical structures with reduced moving mass. / 兼顧光學穩定與低運動質量的結構件。

LIGHTWEIGHT SiC MIRRORS

Stable optical structures with reduced moving mass.

Lightweighted silicon-carbide mirror structures combine stiffness, low thermal expansion, wear resistance and precision geometry for optical and positioning equipment.

≤1 μmVerified flatness / parallelism example
SiCMirror structure
LightweightDesign approach
01

Application and role

SiC square mirrors support lithography and precision optical systems where structural stability and controlled mass are required.

02

Lightweight architecture

A weight-reduction pattern is developed around optical face support, stiffness, mounting points and manufacturability rather than removing material uniformly.

03

Thermal and mechanical stability

Low thermal expansion and high stiffness help reduce surface and alignment change when equipment temperature or motion conditions vary.

04

Geometric precision

Representative SiC mirror structures achieve flatness and parallelism controlled within 1 μm, supporting optical-surface quality and structural stability.

05

Information for evaluation

Please provide clear aperture, overall envelope, mounting and datum scheme, allowable mass, surface figure or flatness, coating requirement and environmental temperature range.

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