SiC OPTICAL BASEPLATES
Thermally stable foundations for optical paths.
Custom silicon-carbide baseplates provide a stiff, low-expansion platform for dual optical paths, inspection systems and precision instrument assemblies.
Optical-path application
The baseplate forms a dual-optical-path foundation for wafer inspection equipment, connecting optical, motion and mounting interfaces in one structure.
Interface integration
Mounting holes, reference surfaces, cable or optical clearances and module interfaces are developed from the customer assembly and alignment strategy.
Geometry and thermal stability
High stiffness, low thermal expansion and high density support optical alignment and dimensional stability across a large structural footprint.
Verified size example
The technical specification records a representative maximum size of 900 × 900 mm and flatness or parallelism up to 0.02 mm. Final capability depends on geometry, datum layout and inspection method.
Information for evaluation
Please provide assembly drawings, optical-path and keep-out zones, mounting and reference points, overall size, target geometry, surface treatment, cleanliness and inspection requirements.
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